微系统和纳米技术（英文版）
出版时间：2011年版
内容简介
微系统和纳米技术是微米纳米技术的两个重要组成部分，既有区别又有联系。微系统和纳米技术是一个新兴的、多学科交叉的科技领域。周兆英等编著的《微系统和纳米技术（精）》由40多位国内外著名专家、学者分章撰写，分为微系统和纳米科学技术基础、微系统技术、纳米技术、应用问题、发展和展望等五个部分，共23章。全书统一规划、各章独立、由浅入深、图文并茂。《微系统和纳米技术（精）》内容的一个重要特点是反映了美、德、英、日和我国权威专家在微系统和纳米技术领域的研究成果，同时也阐述了他们数十年来的研究经验和对该领域的展望，从科技发展的规律说明微米纳米科技发展的阶段性和成熟周期。《微系统和纳米技术（精）》可以作为相关领域本科生、研究生和教师的教学参考书，并可供相关的科技人员参考。
目录
Fundamentals of Microsystem and Nanotechnology
Information Electronics in the Nanotechnology Era
1.1 Introduction
1.2 Nano-CMOSTechnology
1.2.1 Progress ofCMOS Technology
1.2.2 The Second-Order Effects in Small-Size MOSFETs
1.2.3 New Structures and Materials for Nano-MOSFETs
1.2.4 High-PerformanceULSllnterconnection
1.3 Non-CMOS Nanoelectronic Devices
1.3.1 Quantum-Resonant Tunneling Devices
1.3.2 Single Electron Transistor
1.3.3 Carbon NanoTubes （CNT） Electronics,
1.3.4 SpinElectronics
1.3.5 SuperconductorElectronics
1.3.6 Molecular Electronics
1.3.7 Nanoelectromechanical System （NEMS）
1.4 QuantumlnformationProcessing
1.4.1 Basic Concept ofQuantumlnformation Processing
1.4.2 Energy Analysis ofQuantum Computers
1.4.3 Physical Realization ofQuantum Computation
1.5 Conclusion
Referenees
Micro/Nano Fluidics Mechanics and Transducers
2.1 Introduction
2.2 PhysicalConstants
2.3 Fluidic Systems Based on Hydrodynamic Force
2.4 Direct Manipulation ofBiological Object by Hydrodynamic Field
2.4.1 Single Cell Manipulation
2.4.2 DNAManipulation
2.5 Electrokinetic Force Fields
2.5.1 Electrothermal Flow
2.5.2 Electroosmosis
2.5.3 AC Electroosmosis
2.5.4 Electrowetting
2.5.5 Electrophoresis
2.5.6 Dielectrophoresis
2.6 Microfluidic Processes for Bioanalyses
2.6.1 SampleConcentration
2.6.2 Mixing
2.6.3 Separation
2.6.4 Electrochemical DNA Detection
2.6.5 Protein Detection
2.7 Conclusions
Acknowledgements
Referenees
Material Is sues for Microsystems
3.1 Failure Mechanisms ofMaterials Used in Microsystems
3.1.1 Fracture Mechanism
3.1.2 Stiction, Friction, and Wear
3.1.3 FractographAnalysis
3.2 Methods for Measuring Mechanical Properties of
Materials Used in Microsystems
3.2.1 Micro Tensile Testing
3.2.2 Resonance Frequency Method
3.2.3 BulgeTest
3.2.4 Nanoindentation
3.2.5 Beam Bending Test
3.2.6 Test for Fatigue Characteristic and Fracture
Toughness K1c of MEMS Materials
3.3 Structure Materials for Microsystems
3.3.1 Mechanical Properties of Silicon and Silicides
3.3.2 Parylene's Properties and Its Applications
3.4 Materials for Microtribological Application
3.4.1 Self-Assembled Monolayer （SAM） Film
3.4.2 Extra-Thin Hard Film
Referenees
4 Nanopiezotronics and Nanogenerators
4.1 Piezotronic Property ofZn0 Nanowires
4.1.1 Crystal Structure ofZn0
4.1.2 Piezoelectricity ofZn0 Nanowire
4.1.3 Combination ofPiezoelectric and Semiconducting Properties
……
Microsystem
Nanotechnology
Appication Issues
Development and Prospects
